M. Husak (Czech Republic)
Modelling, Microsystems, Simulation, Design, Equivalent
System engineering approach is applied to the design
of microsystems. Complex approach is necessary for the
design of a system integrating several energy domains.
The paper describes possible approaches to the design.
The design is divided into several levels. Basic level is
represented by models including physical and material
properties of designed microsystem structures. For design
optimisation, it is necessary to use modelling on structural
and material levels, further it is necessary to consider
influence of technological process and modelling on
physical level. The highest system level is represented by
system models with the system functions. Various
software tools are used for the model development on
individual levels. Using specified simplifications,
hardware models can be developed on certain levels for
verification of basic properties of the system.
Macromodels enable to apply complex approach to
modelling on selected levels. Frequently design can be
simplified utilizing equivalent models realized by
equivalence of discrete elements between various energy
domains. Presented principles of microsystem design
using models defined at various system levels can be
simplified and then used for educational purposes.