Y.-H. Chung and S.-K. Song (Korea)
Process Control, PID, Fuzzy, Least Square Algorithm
In this paper, we studied how to improve the feed-rate control performance in the PCI process. From the results of computer simulation and field application, we verified that the new feed-rate calculation method using the least square algorithm was proved to be better than to the existing feed-rate calculation method using delayed differential algorithm in the control performance. We also showed that the control results of the fuzzy controller was by far superior to those of the PID controller in the computer simulation based on process modeling.
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