Modeling and Analysis of a Resonant Sensor Actuated by a Bent Beam Thermal Actuator

P.A. Hassanpour, W.L. Cleghorn, E. Esmailzadeh, and J.K. Mills (Canada)


MEMS, analytical modeling, beam vibration, concentrated mass


In this paper, a micromechanical system (MEMS) is modeled analytically. The system consists of three parts: a double-ended tuning fork (DETF), a bent beam thermal actuator, and a suspending mass. The suspending mass transmits the force from the thermal actuator to the DETF and prevents thermal stress to be produced in the DETF by precluding heat transfer to it. The thermal force displacement equations, including the effect of axial stiffness of the resonator, are derived. The natural frequency of the vibration of DETF is a function of applied force to it. The DETF is modeled as two parallel beams, each carrying a concentrated mass in its interval. The characteristic equation of the vibration, which gives the exact values of the natural frequencies of the beam, is derived using method of separation of variables. The effects of the temperature rise as well as the system geometry on the natural frequency of the beam are discussed in detail.

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