Phase Sensitive and Polarization Adjustment Interferometry for Surface Profile Measurements

H.-K. Teng and K.-C. Lang (Taiwan)


Polarization adjustment, interferometer, surface profile, phase unwrapping


A phase sensitive Michelson interferometer with a polarization adjustment approach is proposed to determine the surface profile of optical devices with real time capability. A phase map is generated by calculating several image frames in pixel basis, and then the surface profile is determined after phase unwrapping. The depth resolution in nanometer range and the lateral resolution smaller than 3 micrometer are demonstrated experimentally

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