Influence of Phase Changes on Reflection on Surface Measurements in Optical Profilometry

G.G. Levin, G.N. Vishnyakov, N.N. Moiseev, and V.L. Minaev (Russia)


Optical profilometry, phase changes on reflection


In the article describes influence of phase changes on reflection (PCOR) on measurement of a profile of a surface. The measurement of the profile of a surface was held with help of scanning white light interference microscope and coherent interference microscope of phase shift. Represented results of thickness measurement of aluminum covering, evaporated on a silicon plate without changes correction, which connected with effect of phase changes, with correction, calculated by the handbook data and calculated by ellipsometric measurements. The obtained data compares with atomic-force microscope measurements.

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