Optical Monitoring of Crystal Diameter during Czochralski Growth

S.V. Mikhlyaev (Russia)


Crystal growth, vision system, laser triangulation.


Vision systems used for monitoring melt level and diameter of a crystal growing from high-temperature melt by Czochralski technique are considered. Metrological problems caused by melt rotation and deformation of its surface and also stipulated by peculiarities of image of solid-liquid interface are analyzed. Algorithms of digital image processing and estimating of crystal diameter are considered.

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