Yangqiu Xie, Yonghong Tan, Ruili Dong, and Hong He
internal model control, hysteresis, piezoelectric actuator, sandwich model
A nonlinear internal model control for piezoelectric actuator in a positioning stage is proposed in this paper. A sandwich model with hysteresis is developed to describe the performance of the power driver, piezoelectric actuator and load. In order to compensate the effect of hysteresis inherent in piezoelectric actuator, the corresponding inverse model of hysteresis is constructed based on so-called two-stage method. Then, a nonlinear internal model control strategy based on the sandwich model with hysteresis is proposed. The experimental results show that the proposed control scheme has obtained promising results.
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