Effect of Crystallizing Condition of Anodic Aluminum Oxide Membrane for pH Sensor

Jin-Ho Yeo, Sung-Gap Lee, Hye-Rin Jung, and Ye-Won Jo


Anodic Aluminum Oxide, Capacitive EIS, Biosensor


In this study, we fabricated electrolyte-dielectric-metal(EDM) device incorporating a high-k Al2O3 sensing membrane through porous anodic aluminum oxide (AAO) by two step anodizing process for pH detection. To change the characters of the AAO template, the crystallizing time was varied from 0 hour to 10 hour at 600 oC. The structural properties were observed by field emission scanning electron microscopy (FE-SEM). The pH sensitivity increased in the crystallizing time from 0 hour to 2 hour and gradually saturated at 5 hour or more. The porous AAO sensor with the crystallizing temperature of 10 hour showed the good sensitivity and long-term stability were 54.1 mV/pH, 2.4mV/h, respectively.

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